Low energy ion assisted film growth /
González-Elipe, A. R.
Low energy ion assisted film growth / A.R. González-Elipe, F. Yubero, J.M. Sanz. - London : Singapore : Imperial College Press ; World Scientific [distributor], c2003. - xiv, 283 p. : ill. ; 24 cm.
Includes bibliographical references and index.
1860943519 9781860943515
Thin films--Design and construction.
Thin films--Effect of radiation on.
Ion bombardment.
537
Low energy ion assisted film growth / A.R. González-Elipe, F. Yubero, J.M. Sanz. - London : Singapore : Imperial College Press ; World Scientific [distributor], c2003. - xiv, 283 p. : ill. ; 24 cm.
Includes bibliographical references and index.
1860943519 9781860943515
Thin films--Design and construction.
Thin films--Effect of radiation on.
Ion bombardment.
537