Nanoscale CMOS VLSI circuits: design for manufacturability /
Nanoscale complementary metal oxide semiconductor very large-scale integration circuits
Sandip Kundu, Aswin Sreedhar.
- New York : McGraw-Hill, c2010.
- xv, 296 p. : ill. ; 24 cm.
Includes bibliographical references and index.
Semiconductor manufacturing -- Process and device variability : analysis and modeling -- Manufacturing-aware physical design closure -- Metrology, manufacturing defects, and defect extraction -- Defect impact modeling and yield improvement techniques -- Physical design and reliability -- Design for manufacturability : tools and methodologies.
Metal oxide semiconductors, Complementary--Design and construction. Integrated circuits--Very large scale integration--Design and construction. Nanoelectronics.