| 000 | 00973cam a2200289Ia 4500 | ||
|---|---|---|---|
| 001 | 4098833 | ||
| 005 | 20220527074140.0 | ||
| 008 | 030711s2003 enka b 001 0 eng d | ||
| 020 | _a1860943519 | ||
| 020 | _a9781860943515 | ||
| 035 | _a(OCoLC)ocm52597381 | ||
| 035 | _a(NNC)4098833 | ||
| 040 |
_aUUM _cUUM |
||
| 082 | 0 | 0 |
_222 _a537 |
| 100 | 1 |
_aGonzález-Elipe, A. R. _910002 |
|
| 245 | 1 | 0 |
_aLow energy ion assisted film growth / _cA.R. González-Elipe, F. Yubero, J.M. Sanz. |
| 260 |
_aLondon : _bImperial College Press ; _aSingapore : _bWorld Scientific [distributor], _cc2003. |
||
| 300 |
_axiv, 283 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aThin films _xDesign and construction. _910003 |
|
| 650 | 0 |
_aThin films _xEffect of radiation on. _910004 |
|
| 650 | 0 |
_aIon bombardment. _910005 |
|
| 700 | 1 |
_aYubero, F. _910006 |
|
| 700 | 1 |
_aSanz, J. M. _q(José María) _910007 |
|
| 942 |
_2ddc _cBK |
||
| 999 |
_c2965 _d2965 |
||